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Electrostatic actuator for coupling quantum well electron states

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3 Author(s)
Chan, W.S. ; Dept. of Electr. Eng., Univ. of Minnesota, Minneapolis, MN, USA ; Talghader, J.J. ; Saarinen, M.J.

An actuator was designed and fabricated to actively tune the nanometer-scaled gap between quantum wells in a collapsed cantilever structure. Maximum actuation of 55nm was achieved. Photoluminescence from the quantum wells at the collapsed cantilever was observed at cryogenic temperature, indicating that the wells remained intact after fabrication.

Published in:

Optical MEMS and Nanophotonics (OMN), 2012 International Conference on

Date of Conference:

6-9 Aug. 2012