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High fill factor MEMS mirror array

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3 Author(s)
Buswell, S. ; Preciseley Microtechnol. Corp., Edmonton, AB, Canada ; Lam, L. ; Tiansheng Zhou

The design, fabrication, and quasi-static testing of a high fill factor electrostatically actuated MEMS mirror array with application to spectrometry are presented. Mirror inclination with applied voltage is demonstrated by optical profilometry.

Published in:

Optical MEMS and Nanophotonics (OMN), 2012 International Conference on

Date of Conference:

6-9 Aug. 2012