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A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators

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4 Author(s)
Li Li ; Dept. of Electron. & Electr. Eng., Univ. of Strathclyde, Glasgow, UK ; Bauer, R. ; Brown, G. ; Uttamchandani, D.

A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.

Published in:
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on

Date of Conference: 6-9 Aug. 2012

Page(s):
73 - 74
ISSN :
2160-5033
Print ISBN:
978-1-4577-1511-2
INSPEC Accession Number:
13037871
Conference Location :
Banff, AB
Digital Object Identifier :
10.1109/OMEMS.2012.6318808
Product Type:
Conference Publications

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