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Advanced process control of chemical concentration for solar cell manufacturing

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4 Author(s)
Kashkoush, I. ; Akrion Syst. LLC, Allentown, PA, USA ; Rieker, J. ; Chen, G. ; Nemeth, D.

Solar cell manufacturing requires many wet cleaning steps. Texturization is one of these steps. As a method for light trapping, the texturization step is very critical to assure high efficiency for cells based on both mono-crystalline and multi-crystalline silicon. In order to obtain stable and reproducible manufacturing processes, a reliable and accurate real-time measurement of the etching constituents becomes necessary. Chemical mixtures include: KOH/IPA, HF/HNO3, HF/HCl. Other additives, e.g. surfactants are typically added to enhance the etch uniformity.

Published in:

Photovoltaic Specialists Conference (PVSC), 2012 38th IEEE

Date of Conference:

3-8 June 2012