Advanced process control of chemical concentration for solar cell manufacturing

Solar cell manufacturing requires many wet cleaning steps. Texturization is one of these steps. As a method for light trapping, the texturization step is very critical to assure high efficiency for cells based on both mono-crystalline and multi-crystalline silicon. In order to obtain stable and reproducible manufacturing processes, a reliable and accurate real-time measurement of the etching constituents becomes necessary. Chemical mixtures include: KOH/IPA, HF/HNO
3
, HF/HCl. Other additives, e.g. surfactants are typically added to enhance the etch uniformity.