System Maintenance:
There may be intermittent impact on performance while updates are in progress. We apologize for the inconvenience.
By Topic

Single-crystal LaB6 tip as electron source for high-throughput electron beam lithography

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Rokuta, Eiji ; Fac. of Sci. & Eng., Meijo Univ., Nagoya, Japan ; Murata, H. ; Shimoyama, Hiroshi ; Yasuda, H.
more authors

Thermal field emission (TFE) characteristics of single-crystal LaB6 columnar tip were investigated. After adequate cleaning treatment, TFE was continuously stable at 1600 K and 1700 K in 10-8 Pa. Emission patterns indicated that TFE could be regarded as uniform if we took it into account that the size of the emission region practically used for the e-beam lithography was about 0.5 mm on the fluorescence screen.

Published in:

Vacuum Nanoelectronics Conference (IVNC), 2012 25th International

Date of Conference:

9-13 July 2012