Single-crystal LaB6 tip as electron source for high-throughput electron beam lithography

Thermal field emission (TFE) characteristics of single-crystal LaB
₆
columnar tip were investigated. After adequate cleaning treatment, TFE was continuously stable at 1600 K and 1700 K in 10
^-8
Pa. Emission patterns indicated that TFE could be regarded as uniform if we took it into account that the size of the emission region practically used for the e-beam lithography was about 0.5 mm on the fluorescence screen.