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Production of extremely low energy electron beam with silicon-based field emitter arrays and its application to space charge neutralization of low-energy and high-current ion beam

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7 Author(s)
Gotoh, Y. ; Dept. of Electron. Sci. & Eng., Kyoto Univ., Kyoto, Japan ; Taguchi, S. ; Ikeda, K. ; Kitagawa, T.
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An electron beam with an energy as low as 5 eV and a current of 0.1 mA was produced by an electron source with a 10,000-tip silicon-based field emitter array (Si-FEA). In order to decelerate the electrons, we have designed an electrostatic lens system for the divergent beam extracted from the FEA. Spatial distribution of the electrons was investigated by a fluorescent screen with a multiple channel plate. Finally, space charge neutralization of low-energy and high-current ion beam was demonstrated with the present electron source.

Published in:

Vacuum Nanoelectronics Conference (IVNC), 2012 25th International

Date of Conference:

9-13 July 2012