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An electron beam with an energy as low as 5 eV and a current of 0.1 mA was produced by an electron source with a 10,000-tip silicon-based field emitter array (Si-FEA). In order to decelerate the electrons, we have designed an electrostatic lens system for the divergent beam extracted from the FEA. Spatial distribution of the electrons was investigated by a fluorescent screen with a multiple channel plate. Finally, space charge neutralization of low-energy and high-current ion beam was demonstrated with the present electron source.
Published in:
Vacuum Nanoelectronics Conference (IVNC), 2012 25th International
Date of Conference: 9-13 July 2012
- Page(s):
- 1 - 2
- ISSN :
- pending
- E-ISBN :
- 978-1-4673-1982-9
- Print ISBN:
- 978-1-4673-1983-6
- INSPEC Accession Number:
- 13036997
- Conference Location :
- Jeju
- Digital Object Identifier :
- 10.1109/IVNC.2012.6316868
- Product Type:
- Conference Publications
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