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\Omega -Gated Silicon and Strained Silicon Nanowire Array Tunneling FETs

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9 Author(s)
S. Richter ; Peter Grünberg Institute 9, JARA-FIT, Forschungszentrum Jülich, Jülich, Germany ; C. Sandow ; A. Nichau ; S. Trellenkamp
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This letter presents experimental results on tunneling field-effect transistors featuring arrays of Ω-gated uniaxially strained and unstrained silicon nanowires. The gate control of a SiO2/poly-Si gate stack is compared with a high-k/metal gate stack. Steep inverse subthreshold slopes down to 76 mV/dec and relatively high on-currents were achieved with the combination of high-k/metal gate and strained silicon nanowires. We observed negative differential conductance in the output characteristics, which we attribute to hot-carrier effects in the strong electric fields at the reverse-biased tunnel junction.

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IEEE Electron Device Letters  (Volume:33 ,  Issue: 11 )