Skip to Main Content
The authors report the growth of TiO2 nanowires by heating the Ti/glass template and the fabrication of a TiO2 nanowire metal-insulator-semiconductor (MIS) photodetector (PD). Compared with a TiO2 nanowire metal-semiconductor- metal PD, it was found that we could achieve a photocurrent 29 times larger. It was also found that the dynamic response of the TiO2 nanowire MIS PD was stable and reproducible with an on/off current contrast ratio of around 180. With an incident light wavelength of 390 nm and an applied bias of 5 V, it was found that the measured responsivity of the PD was 2.46 × 10-3 A/W. Furthermore, the noise equivalent power and the detectivity of the fabricated TiO2 nanowire MIS PD were 7.49 × 10-12 W and 8.86 × 1011 cm · Hz0.5 · W-1, respectively.