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Application of surface acoustic wave spectroscopy for study of physical properties of thin films

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1 Author(s)
Shayapov, V.R. ; Nikolaev Inst. of Inorg. Chem., Novosibirsk, Russia

Some possibilities of surface acoustic wave spectroscopy (SAWS) for thin films investigation are considered. Information value of SAWS method is dependent on the form of sound velocity dispersion curve. Non-linear dispersion curve allow obtaining of two values of four which describe film's properties. Linear dispersion curve makes it possible to calculate only one film's property. Special approach is presented to overcome this limitation. Boron carbonitride BCxNy and silicon carbonitride SiCxNyHz films are studied by SAWS. Their densities and Young's modules are determined. The results are corresponding to known data on structure and composition of the films.

Published in:

Micro/Nanotechnologies and Electron Devices (EDM), 2012 IEEE 13th International Conference and Seminar of Young Specialists on

Date of Conference:

2-6 July 2012