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Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography

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3 Author(s)
Utkin, D.E. ; Inst. of Semicond. Phys., Novosibirsk, Russia ; Nasimov, D.A. ; Latyshev, A.V.

It is brought an approach of creation and close-packing two-dimensional photonic crystals with given sizes of elements by the EBL. The main problems of formation these structures were considered.

Published in:

Micro/Nanotechnologies and Electron Devices (EDM), 2012 IEEE 13th International Conference and Seminar of Young Specialists on

Date of Conference:

2-6 July 2012