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The role of self-directed work teams in a concurrent, multi-generation semiconductor process development effort

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3 Author(s)
Weber, C. ; Integrated Circuit Technol. Dev. Center, Hewlett-Packard Co., Palo Alto, CA, USA ; Rosner, J. ; Chang, P.

An integrated circuit process R&D facility concurrently conducts advanced research, process control and product prototyping of three Very Large Scale Integrated Circuit process generations. Self-managed inter-departmental teams of process engineers and device physicists govern most aspects of process integration through a peer review process, and collectively design short cycle experiments. Organizational structures are adjusted to minimize the number of communication channels. Key metrics traditionally associated with process integration improve by a factor of three

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI

Date of Conference:

10-12 Sep 1997