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Application of a bitmap analysis system to the forefront of DRAM devices development

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2 Author(s)
Hamada, T. ; Evaluation Technol. Dept., NEC Corp., Kawasaki, Japan ; Sugimoto, M.

A bitmap analysis system with a shape classification has been developed for use in manufacturing of forefront DRAM devices. This system shortens the time needed to improve the processing conditions according to the results of failure analysis. This system is a part of a total yield enhancement system have already been put to practical use in mass production

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI

Date of Conference:

10-12 Sep 1997