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Marathon and IRONMANTM testing of the Trikon Technologies Sigma ForceFillTM

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11 Author(s)
Strupp, J. ; Texas Instrum. Inc., Dallas, TX, USA ; Gonzalez, D. ; McKeon, D. ; Saran, M.
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This paper focuses on the testing and improvement of the Trikon Technologies Sigma ForceFillTM tool installed in a pilot line at the TI Dallas Productization Fab, DPI. A series of five tests were run on the system to determine its viability as a volume production tool

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI

Date of Conference:

10-12 Sep 1997