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Statistical process simulation with neural network single step feed-back for automatic process monitoring and control

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3 Author(s)
Chen, V.M.C. ; Submicron Dev. Center, Adv. Micro Devices, Sunnyvale, CA, USA ; Yung-Tao Lin ; Yeng-Kaung Peng

This project integrates flexible data collection module, relational database, manufacturing execution system (MES) interface, and a simulation system that employs statistical approach and advanced numerical processing methodology. Concept of process-step-decoupling using statistical data correlation and automatic simulation calibration are implemented. The purpose is to have an accurate system that satisfies manufacturing requirements and at the same time a flexible system that satisfies development requirements. This tool is practical in the sense that the maintenance, employment and development cycle are in synchronize with the technology development cycle, and hence the help that the engineer needed can be provides at the right time

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI

Date of Conference:

10-12 Sep 1997