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Position tracking accuracy of XY table is important for precise operations in manufacturing field. To achieve good performance for high speed and precision, adaptive feedforward using ZPETC is proposed. In this paper, the technique is improved by introducing Model Reference into the system. The reference model tells how the process output ideally should respond to the command signal. The system transfer functions of X and Y axis are obtained via system identification technique using Matlab Toolbox. The performance of the controller in reducing the tracking error using high frequency input is analyzed through simulation. The system is also tested by implementing the adaptive controller without model reference for comparison purposes. Both controller performances are compared and the result shows tremendous superior tracking performance.