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Lead zirconate titanate nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical system applications

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7 Author(s)
Guillon, S. ; Nanobiosystems Group, Lab. d''Anal. et d''Archit. des Syst., Toulouse, France ; Saya, D. ; Mazenq, L. ; Costecalde, J.
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The advantage of using lead zirconate titanate (PbZr0.54Ti0.46O3) ceramics as an active material in nanoelectromechanical systems (NEMS) comes from its relatively high piezoelectric coefficients. However, its integration within a technological process is limited by the difficulty of structuring this material with submicrometer resolution at the wafer scale. In this work, we develop a specific patterning method based on optical lithography coupled with a dual-layer resist process. The main objective is to obtain sub-micrometer features by lifting off a 100-nm-thick PZT layer while preserving the material's piezoelectric properties. A subsequent result of the developed method is the ability to stack several layers with a lateral resolution of few tens of nanometers, which is mandatory for the fabrication of NEMS with integrated actuation and read-out capabilities.

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Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:59 ,  Issue: 9 )