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The high-tech industry has evolved to reflect the importance of scientific level of a country and lead the development of new industries and economic growth, technical efficiency relates to an industry or business viability and development opportunities, is an important way able to effectively improve the area or industrial economy. By using the three-stage DEA model which is combined with SFA and selecting the data of Beijing high-tech industry between 1995 and 2009, this paper gave the empirical study of its technical efficiency. The purpose of the study is to compare the difference of the technical efficiency after separating the environmental variables and the statistical noise. Meanwhile, by analyzing the five industries within Beijing high-tech industry, this article elaborated the present situation and the problem of the technical efficiency of Beijing high-tech industry, and then it put forward the related countermeasure proposal. Finally, the future research on the technical efficiency of high-tech industry was discussed.