By Topic

A Microdischarge-Based Deflecting-Cathode Pressure Sensor in a Ceramic Package

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Wright, S.A. ; Exponent Failure Anal. Assoc., Inc., Menlo Park, CA, USA ; Harvey, H.Z. ; Gianchandani, Y.B.

This paper describes a microdischarge-based pressure sensor for harsh liquid environments that utilizes a ceramic package sealed with a deflecting diaphragm that also serves as a cathode. Located within the package is a reference cathode and an anode. The microdischarges are created between the two cathodes and the anode. The external pressure deflects the diaphragm, varying the interelectrode spacing and changing the differential current between the two competing cathodes. The electrodes are fabricated from a Ni foil and separated by dielectric spacers within a micromachined glass cavity. The structures are enclosed within a 1.6-mm3 ceramic surface mount package. Device sensitivity is approximately 4900 ppm/ lbf/in2 (72 000 ppm/atm), and diaphragm displacement is approximately 0.15 μm/atm.

Published in:

Microelectromechanical Systems, Journal of  (Volume:22 ,  Issue: 1 )