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Impact of snapback-induced hole injection on gate oxide reliability of N-MOSFETs

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3 Author(s)
K. R. Mistry ; Digital Equipment Corp., Hudson, MA, USA ; D. B. Krakauer ; B. S. Doyle

N-channel MOSFETs associated with CMOS output driver circuits are often driven deep into snapback during electrostatic discharge (ESD) events. The charge-pumping technique is used to show significant hole trapping in the oxide resulting from snapback bias conditions. Floating-gate measurements verify that significant hole current flows through the oxide during snapback. It is noted that snapback-induced hole injection can dramatically reduce gate oxide charge to breakdown and explains reduced hot-carrier lifetimes after snapback stress. Snapback stress results in oxide damage that is in many ways similar to that found during hot-carrier stress and radiation damage. These long-term reliability concerns limit the maximum allowable snapback current.<>

Published in:

IEEE Electron Device Letters  (Volume:11 ,  Issue: 10 )