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The structural and piezoresponse properties of c-axis-oriented Aurivillius phase Bi5Ti3FeO15 thin films deposited by atomic vapor deposition

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5 Author(s)
Zhang, P.F. ; Tyndall National Institute, University College Cork, Lee Maltings, Dyke Parade, Cork, Ireland ; Deepak, N. ; Keeney, L. ; Pemble, M.E.
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The deposition by atomic vapor deposition of highly c-axis-oriented Aurivillius phase Bi5Ti3FeO15 (BTFO) thin films on (100) Si substrates is reported. Partially crystallized BTFO films with c-axis perpendicular to the substrate surface were first deposited at 610 °C (8% excess Bi), and subsequently annealed at 820 °C to get stoichiometric composition. After annealing, the films were highly c-axis-oriented, showing only (00l) peaks in x-ray diffraction (XRD), up to (0024). Transmission electron microscopy (TEM) confirms the BTFO film has a clear layered structure, and the bismuth oxide layer interleaves the four-block pseudoperovskite layer, indicating the n = 4 Aurivillius phase structure. Piezoresponse force microscopy measurements indicate strong in-plane piezoelectric response, consistent with the c-axis layered structure, shown by XRD and TEM.

Published in:

Applied Physics Letters  (Volume:101 ,  Issue: 11 )

Date of Publication:

Sep 2012

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