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Scanning Electron Microscope (SEM) is widely used in many fields to look into the nanometer world. However, there is non-linear distortion near the left boundary of high resolution images captured by SEM, which has bad effect on image processing such as image mosaic. In this paper, we propose a method to correct such distortion based on non-equidistant GM(1,1) model. We first extract pair-wise points which are the same position on target scene from two overlapped images respectively. Then the distortion is modeled using non-equidistant GM(1,1) which maps pixels of distorted image to their true positions. Finally, the corrected image is obtained with image interpolation. There is no need to pre-define the distortion model or parameters for the proposed method, and it is easy to use and flexible. Experiments show that the proposed method yields accurate correction results.
Date of Conference: 15-17 July 2012