By Topic

Fabrication of sub-spot-size microchannel of microfluidic chip using CO2 laser processing with metal-film protection

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $33
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
C. K. Chung ; Department of Mechanical Engineering and Center for Micro/Nano Science and Technology, National Cheng Kung University ; T. K. Tan ; S. L. Lin ; K. Z. Tu
more authors

CO2 laser ablation has been a popular technique for microfluidic chip fabrication but it always suffers some problems such as bulges, clogging, re-solidification and large heat-affected zone around the rim of channels and holes. In this Letter, a simple effective method for diminishing the defects has been proposed using a metal-film protection for CO2 laser ablation. Polymethylmethancrylate (PMMA) was used as a substrate to demonstrate the fabricated microfluidic channels without clogging as well as bulges reduced. The feature size of the microchannel can also distinctly be decreased from 268 m in air to around 58 m with metal-film-protection method, which is smaller than the laser-beam spot size. The bulge height was reduced to less than 0.2 m and clogging effect in the channel junction was not occurred. ANSYS simulation was also used to analyse the temperature distribution on PMMA substrate during laser ablation in air and with metal-film protection. The method presented here is suitable for microfluidic device production while overcoming the bad surface quality and low-resolution limit of CO2 laser ablation in air.

Published in:

IET Micro & Nano Letters  (Volume:7 ,  Issue: 8 )