By Topic

Reversed Nonlinear Oscillations in Lamé-Mode Single-Crystal-Silicon Microresonators

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Haoshen Zhu ; Dept. of Electron. Eng., City Univ. of Hong Kong, Kowloon, China ; Lee, J.E.-Y.

The spring hardening effect is reported here for the first time in a single-crystal-silicon bulk mode resonator. Reversing nonlinear behaviors (changing from spring softening to hardening) has been observed in fabricated silicon-on-insulator square-plate resonators of identical dimensions but aligned against different crystal orientations. This orientation-dependent reversal in the nonlinearity is explained using a dynamic model which incorporates a nonlinear strain-stress relation. The frequency response of the devices (with different dimensions) under various driving conditions can be closely predicted using the model.

Published in:

Electron Device Letters, IEEE  (Volume:33 ,  Issue: 10 )