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\hbox {ZrLaO}_{x}\hbox {/ZrTiO}_{x}\hbox {/ZrLaO}_{x} Laminate as Insulator for MIM Capacitors With High Capacitance Density and Low Quadratic Voltage Coefficient Using Canceling Effect

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5 Author(s)
Lun Lun Chen ; Dept. of Eng. & Syst. Sci., Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Yung-Hsien Wu ; Yu-Bo Lin ; Chia-Chun Lin
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Metal-insulator-metal (MIM) capacitors with ZrLaOx/ZrTiOx/ZrLaOx laminate as the insulator were explored in this work. Single ZrTiOx dielectric was found to have a negative quadratic voltage coefficient of capacitance (VCC-α) with a high κ value of 22.5. By integrating this dielectric with ZrLaOx which provides a positive VCC-α and a high κ value of 25.8, the “canceling effect” of VCC-α can be achieved while a high capacitance density can be maintained. MIM capacitors with the laminated structure display desirable characteristics in terms of a capacitance density of 14.6 fF/μm2, a low VCC-α of 33 ppm/V2, negligible frequency dispersion, and satisfactory leakage current of 1.6 × 10-6 A/cm2 at -1.5 V. These results also well meet the International Technology Roadmap for Semiconductors requirement set for 2020.

Published in:

Electron Device Letters, IEEE  (Volume:33 ,  Issue: 10 )

Date of Publication:

Oct. 2012

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