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Optical limitations to cell size reduction in IT-CCD image sensors

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15 Author(s)
Satoh, T. ; Syst. Micro Div, NEC Corp., Kanagawa, Japan ; Mutoh, N. ; Furumiya, M. ; Murakami, I.
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We have determined the practical limits of cell size reduction in interline-transfer charge-coupled device (IT-CCD) image sensors, which result from diffraction occurring at the aperture above the photodiode. We have found that image cell size cannot be reduced to a level for which aperture width would fall below about 0.2 μm. We have also found, however that image cells with greater than 0.2 μm aperture size are sensitive over the entire wavelength range of visible light, and that sensitivity can be increased by thinning the photoshield film

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Electron Devices, IEEE Transactions on  (Volume:44 ,  Issue: 10 )