Cart (Loading....) | Create Account
Close category search window
 

Poly-Si Based Two-Axis Differential Capacitive-Sensing Accelerometer

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Chun-Kai Chan ; Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Sung-Cheng Lo ; Yu-Che Huang ; Mingching Wu
more authors

This paper reports the design and implementation of a two-axis capacitive-type accelerometer using well-known two poly-Si processes. The accelerometer design consists of a pendulum proof-mass (bulk Si), a gimbal-spring (poly-Si film), and vertical-comb sensing electrodes. This design has three merits: 1) pendulum proof-mass to produce torque by in-plane acceleration; 2) high-aspect-ratio-micromachined (HARM) gimbal-springs enable the detection of two-axis accelerations; and 3) vertical-combs of different vertical positions enable the differential sensing electrodes design to detect the angular motion. In short, this paper exploits the vertical-comb electrodes for differential capacitive sensing to detect the two-axis in-plane accelerations. Measurement results show that the sensitivities (nonlinearity) of etch direction are 17.87 mV/G (2.65%) of X-axis, and 16.54 mV/G (2.71%) of Y-axis in the excitation range of 0.6~2 G. Due to the HARM gimbal-spring design, the cross axis sensitivity introduced by the Z-axis excitation is less than 0.3% for both X-axis and Y-axis sensing. However, the cross-axis error between the X-axis and the Y-axis sensing elements still need to be improved.

Published in:

Sensors Journal, IEEE  (Volume:12 ,  Issue: 12 )

Date of Publication:

Dec. 2012

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.