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Characterization of Diamond-Like Carbon Films Prepared by Plasma Enhanced Chemical Vapor Deposition with Vertical-capacitor Electrodes

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4 Author(s)
Kwang Bae Lee ; Department of Physics, Sangji University ; Rhee, Byung Roh ; Chong Tak Kim ; Jin Jang

First Page of the Article

Published in:

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Date of Conference:

17-21 Aug. 1997