Referenced Items are not available for this document.
This letter documents the design, microfabrication, and testing of integrated and continuously tuned radiofrequency copper (Cu) inductors with low-power large-throw lead-zirconate-titanate (PZT) actuators. The devices, with inductances in the 3-10-nil range, achieved high-quality factors, Q >; 10 (1-6 Gilz range), and tuning ratios as high as 2.6:1 at 20-V actuation with nanowatt-power consumption. This was enabled by the monolithic integration of three electroplated Cu layers (~10 μm per layer) and PZT microelectromechanical system actuators. Two tunable inductor design types, positively and negatively coupled designs, and the tradeoff between tuning ratio and inductor Q are considered.
Published in:
Electron Device Letters, IEEE
(Volume:33
,
Issue:
10
)
Date of Publication: Oct. 2012
- Page(s):
- 1483 - 1485
- ISSN :
- 0741-3106
- INSPEC Accession Number:
- 13029890
- Digital Object Identifier :
- 10.1109/LED.2012.2207700
- Product Type:
- Journals & Magazines
- Date of Publication :
- 16 August 2012
- Date of Current Version :
- 21 September 2012
- Issue Date :
- Oct. 2012
- Sponsored by :
- IEEE Electron Devices Society
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