Cart (Loading....) | Create Account
Close category search window
 

A 2.8-mm Imaging Probe Based On a High-Fill-Factor MEMS Mirror and Wire-Bonding-Free Packaging for Endoscopic Optical Coherence Tomography

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Samuelson, S.R. ; Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA ; Lei Wu ; Jingjing Sun ; Se-woon Choe
more authors

This paper reports a miniature optical coherence tomography (OCT) probe and high-resolution 3-D OCT imaging results obtained with this side-view probe. The probe is only 2.8 mm in diameter, enabled by a unique high-fill-factor electrothermal MEMS mirror with hidden actuators and a novel wire-bonding-free packaging technique. The MEMS mirror has a large mirror aperture of 1 mm with a chip size of only 1.55 mm × 1.7 mm × 0.5 mm. The fabricated device achieves large 2-D scan optical angles up to 46° at only 4.8 V. The specific time-domain OCT system utilized is detailed, and the assembled side-view probe demonstrates multiple high-resolution 3-D OCT imaging results that demonstrate detailed images of a mouse ear and images detecting the presence of tumor cells, and the contrast with a normal tissue is qualitatively analyzed.

Published in:

Microelectromechanical Systems, Journal of  (Volume:21 ,  Issue: 6 )

Date of Publication:

Dec. 2012

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.