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Breath is one of vital functions for human. Development of an effective breath sensor to detect apnea is important issue in medical care. A new technology with integration of CMOS circuits and nano electromechanical system (NEMS) as breath sensor has been presented. Through a specifically treated procedure, multi-walled carbon nanotubes (MWCNTs) were immobilized on a silicon wafer. Techniques by photolithography and sputtering were then implemented on the MWCNT film to develop micro interdigitated electrodes as the basic structure of a breath sensor. The sensor was connected to a programmed Microchip operator to become a warning device for abnormal human breath. In this preliminary study with variable patterns of simulated tests to volunteers, MWCNT sensor combined with a CMOS processor could response rapidly and effectively as a detector for exhaled breath flow. Our results highlight that integrated CMOS circuits and NEMS could improve the pattern of respiratory care in the future.