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Resonant PZT MEMS Scanner for High-Resolution Displays

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7 Author(s)
Baran, U. ; Dept. of Electr. & Electron. Eng., Koc Univ., Istanbul, Turkey ; Brown, D. ; Holmstrom, S. ; Balma, D.
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A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at the mechanical resonance frequency of 40 kHz provides an optical scan angle of 38.5° for the 1.4-mm-wide mirror. This scanner is a significant step toward achieving full-high-definition resolution (1920 × 1080 pixels) in mobile laser projectors without the use of vacuum packaging. The reported piezoscanner requires no bulky components and consumes <; 30-mW power at maximum deflection, thus providing significant power and size advantages, compared with reported electromagnetic and electrostatic scanners. Interferometry measurements show that the dynamic deformation is at acceptable levels for a large fraction of the mirror and can be improved further for diffraction-limited performance at full resolution. A design variation with a segmented electrode pair illustrated that reliable angle sensing can be achieved with PZT for closed-loop control of the scanner.

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Microelectromechanical Systems, Journal of  (Volume:21 ,  Issue: 6 )