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Browse Journals & Magazines > Applied Physics Letters ...> Volume:101 Issue:6 Help

Kinetic study of GeO disproportionation into a GeO2/Ge system using x-ray photoelectron spectroscopy

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3 Author(s)
Kai Wang, Sheng ; Microwave Devices and Integrated Circuits Department, Institute of Microelectronics, Chinese Academy of Sciences, #3 Bei-Tu-Cheng West Road, Beijing 100029, China ; Liu, Hong-Gang ; Toriumi, Akira

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GeO disproportionation into GeO2 and Ge is studied through x-ray photoelectron spectroscopy. Direct evidence for the reaction 2GeO → GeO2 + Ge after annealing in ultra-high vacuum is presented. Activation energy for GeO disproportionation is found to be about 0.7 ± 0.2 eV through kinetic and thermodynamic calculations. A kinetic model of GeO disproportionation is established by considering oxygen transfer in the GeO network. The relationship between GeO disproportionation and GeO desorption induced by GeO2/Ge interfacial reaction is discussed, and the apparent contradiction between GeO desorption via interfacial redox reaction and GeO disproportionation into Ge and GeO2 is explained by considering the oxygen vacancy.

Published in:
Applied Physics Letters  (Volume:101 ,  Issue: 6 )

Date of Publication: Aug 2012

Page(s):
061907 - 061907-4
ISSN :
0003-6951
Digital Object Identifier :
10.1063/1.4738892
Product Type:
Journals & Magazines
Date of Current Version :
09 August 2012
Issue Date :
Aug 2012

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