Cart (Loading....) | Create Account
Close category search window
 

Tunable, Dual-Gate, Silicon-on-Insulator (SOI) Nanoelectromechanical Resonators

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Lin Yu ; Dept. of Phys., Purdue Univ., West Lafayette, IN, USA ; Pajouhi, H. ; Nelis, M.R. ; Rhoads, Jeffrey F.
more authors

Resonant nanoelectromechanical systems (NEMS) have the potential to have significant impact in mass sensing, signal processing, and field detection applications, if the challenges associated with processing, material, and geometric variability can be mitigated. The research presented here details a breakthrough in the design and development of resonant NEMS aimed at addressing these challenges. Specifically, this study details the fabrication, characterization, and tuning of dual-gate silicon nanoelectromechanical resonators, which are transduced electrostatically and realized with close to 100% yield. These devices are fabricated on a silicon-on-insulator (SOI) substrate using only top-down microfabrication techniques and can be easily integrated with SOI-CMOS transistors, enabling the development of fully integrated CMOS-NEMS with highly tunable nonlinear frequency response characteristics.

Published in:

Nanotechnology, IEEE Transactions on  (Volume:11 ,  Issue: 6 )

Date of Publication:

Nov. 2012

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.