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Embedded monofilament UV-LIGA techniques for microfabrication of beam tunnels in a 220 GHz wideband serpentine waveguide amplifier

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7 Author(s)
Colin D. Joye ; US Naval Research Laboratory, Code 6840, 4555 Overlook Ave. SW, Washington, DC 20375 USA ; Jeffrey P. Calame ; Alan M. Cook ; Khanh T. Nguyen
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A 50 watt, wideband serpentine amplifier is under development to demonstrate a novel beam tunnel fabrication technique capable of forming arbitrarily long beam tunnels of very small diameter using a single Ultraviolet Lithography (UV-LIGA) exposure step.

Published in:

Vacuum Electronics Conference (IVEC), 2012 IEEE Thirteenth International

Date of Conference:

24-26 April 2012