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Physically-Aware Analysis of Systematic Defects in Integrated Circuits

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2 Author(s)

Design-induced systematic defects are serious threats to the semiconductor industry. This paper develops novel techniques to identify and prevent such defects, which facilitate to evaluate the effectiveness of DFM rules and improve the manufacturing process and design for yield enhancement.

Published in:

Design & Test of Computers, IEEE  (Volume:29 ,  Issue: 5 )