By Topic

Smart Flow Sensor With On-Chip CMOS Interface Performing Offset and Pressure Effect Compensation

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)

A single-chip smart flow sensor based on a thermal principle is presented. The device is fabricated through a commercial complementary metal-oxide-semiconductor (CMOS) process combined with a postprocessing procedure. A configurable electronic interface performing signal reading and nonideality compensation is integrated with the sensing structures on the same chip. The interface implements recently proposed approaches to offset and pressure effect compensation. Detailed experimental results are presented demonstrating correct operation of the proposed microsystem.

Published in:

IEEE Sensors Journal  (Volume:12 ,  Issue: 12 )