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A single-chip smart flow sensor based on a thermal principle is presented. The device is fabricated through a commercial complementary metal-oxide-semiconductor (CMOS) process combined with a postprocessing procedure. A configurable electronic interface performing signal reading and nonideality compensation is integrated with the sensing structures on the same chip. The interface implements recently proposed approaches to offset and pressure effect compensation. Detailed experimental results are presented demonstrating correct operation of the proposed microsystem.
Date of Publication: Dec. 2012