Referenced Items are not available for this document.
A single-chip smart flow sensor based on a thermal principle is presented. The device is fabricated through a commercial complementary metal-oxide-semiconductor (CMOS) process combined with a postprocessing procedure. A configurable electronic interface performing signal reading and nonideality compensation is integrated with the sensing structures on the same chip. The interface implements recently proposed approaches to offset and pressure effect compensation. Detailed experimental results are presented demonstrating correct operation of the proposed microsystem.
Published in:
Sensors Journal, IEEE
(Volume:12
,
Issue:
12
)
Date of Publication: Dec. 2012
- Page(s):
- 3309 - 3317
- ISSN :
- 1530-437X
- INSPEC Accession Number:
- 13057116
- Digital Object Identifier :
- 10.1109/JSEN.2012.2210788
- Product Type:
- Journals & Magazines
- Date of Publication :
- 30 July 2012
- Date of Current Version :
- 16 October 2012
- Issue Date :
- Dec. 2012
- Sponsored by :
- IEEE Sensors Council
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