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Modified Adaptive Control of a 10,000 Square Foot Cleanroom Using Particle Counters to Maintain Design Specifications and Reduce Energy Consumption

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3 Author(s)
Tribble, T.A. ; Fac. of Arts & Sci., Phys. Resources & Planning, Harvard Univ., Cambridge, MA, USA ; Rochester, C. ; Beauvais, M.

As the post-construction resident facilities management team, we present the iterative steps planned and taken in order to reduce the energy profile of a 10,000 GSF, Class 100 - 10,000 research cleanroom. These steps have been planned and taken without sacrifice to initial design requirement or hindrance to installed ''tools''. We describe the process of taking a finished design and fully constructed all new cleanroom and modifying it. Our goal was to equal or exceed design specifications for air quality, but to significantly reduce the energy consumption of the HVAC systems serving this space. To achieve this goal we used twenty-six commercial particle counters, combined with a revised Building Automation System (BAS) control programming sequence to achieve these results. This change led to a series of additional alterations of cleanroom system components. Each of these alterations was monitored for particle performance in the cleanroom. The system changes completed have generated HVAC performance improvements and at the same time, significant energy savings.

Published in:

University/Government/Industry, Micro/Nano Symposium (UGIM), 2012 19th Biennial

Date of Conference:

9-10 July 2012