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A self-chopped relaxation oscillator with adaptive supply generation provides the stable output clock against variations in temperature and supply voltages. The frequency drift is less than ±0.1% for the supply voltage changing from 1.6 to 3.2 V and ±0.1% for a temperature range from -20 to 100°C, which is reduced by 83% with the self-chopped technique. This relaxation oscillator is implemented in a 60-nm CMOS technology with its active area equals to 0.048 mm2. It consumes 2.8 uA from a 1.6-V supply.