By Topic

Gas sensing using thermally actuated dual plate resonators and self-sustained oscillators

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Xiaobo Guo ; Dept. of Mech. & Mater. Eng., Univ. of Denver, Denver, CO, USA ; Yun-bo Yi ; Amir Rahafrooz ; Siavash Pourkamali

This paper presents an experimental investigation of the characteristics of dual plate thermal-piezoresistive MEMS resonators and self-sustained oscillators in different gases. It has been demonstrated that the natural frequency of such devices changes in different gases. Interestingly, for the same silicon structure, frequency shifts in opposite directions were observed when operated in a resonator versus a self-sustained oscillator configuration. Both thermal conductivity and density of the surrounding gas have been identified as factors affecting the operating frequency of such devices. It has been demonstrated that in resonator configuration (linear operation), the resonator frequency shift is mostly a function of gas thermal conductivity. In the oscillator configuration (nonlinear operation) however, the effect of gas density on the nonlinear stiffness of the oscillator is the dominant factor. Relatively large measured frequency shift, as high as -1340ppm in a 1:5 mixture of helium-nitrogen compared to the natural frequency in pure nitrogen, shows the potential of such devices as highly sensitive gas sensors.

Published in:

2012 IEEE International Frequency Control Symposium Proceedings

Date of Conference:

21-24 May 2012