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2.97-GHz CVD diamond ring resonator with Q >40,000

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7 Author(s)
Naing, T.L. ; Dept. of Electr. Eng. & Comput. Sci., Univ. of California at Berkeley, Berkeley, CA, USA ; Beyazoglu, T. ; Lingqi Wu ; Akgul, M.
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A capacitive-gap transduced micromechanical ring resonator based on a radial contour vibration mode and constructed from hot filament CVD boron-doped microcrystalline diamond has achieved a Q of 42,900 at 2.9685GHz that represents the highest series-resonant Q yet measured at this frequency for any on-chip room temperature resonator, as well as the highest f·Q of 1.27×1014 for acoustic resonators, besting even macroscopic bulk-mode devices. Values like these in a device occupying only 870μm2 may soon make possible on-chip realizations of RF channelizers and ultra-low phase-noise GHz oscillators for secure communications.

Published in:

Frequency Control Symposium (FCS), 2012 IEEE International

Date of Conference:

21-24 May 2012