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Optical actuation and detection of MEMS resonators: Behavioral modeling and phase noise simulations

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9 Author(s)
Papin, G. ; DMPH, ONERA, Chatillon, France ; Levy, R. ; Bosseboeuf, A. ; Fabbri, F.
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Optical actuation and detection of MEMS resonators can improve the resolution of their motion detection compared to standard detection techniques (capacitive, piezoelectric). In this paper, a behavioral model of MEMS resonator with optical actuation and detection and the associated oscillator circuit are presented and used to determine its performances.

Published in:

Frequency Control Symposium (FCS), 2012 IEEE International

Date of Conference:

21-24 May 2012