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Towards a free open source process and device simulation framework

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5 Author(s)
Weinbub, J. ; Inst. for Microelectron., Tech. Univ. Wien, Vienna, Austria ; Rupp, K. ; Filipovic, L. ; Makarov, A.
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We present an approach for implementing open source simulation tools in the field of semiconductor device and process simulation based on our execution framework ViennaX. We apply a modular concept, where functionality is separated into plugins, which in turn can be combined to form full-fledged simulation tools by utilizing ViennaX's task graph approach. Due to the applied plugin concept, a high degree of flexibility is introduced, as components can be easily exchanged. Simulation results are shown, depicting the applicability of our approach for different tools.

Published in:

Computational Electronics (IWCE), 2012 15th International Workshop on

Date of Conference:

22-25 May 2012