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A 22nm high performance and low-power CMOS technology featuring fully-depleted tri-gate transistors, self-aligned contacts and high density MIM capacitors

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47 Author(s)
Auth, C. ; Logic Technol. Dev., Intel Corp., Hillsboro, OR, USA ; Allen, C. ; Blattner, A. ; Bergstrom, D.
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A 22nm generation logic technology is described incorporating fully-depleted tri-gate transistors for the first time. These transistors feature a 3rd-generation high-k + metal-gate technology and a 5th generation of channel strain techniques resulting in the highest drive currents yet reported for NMOS and PMOS. The use of tri-gate transistors provides steep subthreshold slopes (~70mV/dec) and very low DIBL (~50mV/V). Self-aligned contacts are implemented to eliminate restrictive contact to gate registration requirements. Interconnects feature 9 metal layers with ultra-low-k dielectrics throughout the interconnect stack. High density MIM capacitors using a hafnium based high-k dielectric are provided. The technology is in high volume manufacturing.

Published in:

VLSI Technology (VLSIT), 2012 Symposium on

Date of Conference:

12-14 June 2012