By Topic

Comparison of applications of laser probing, laser-induced circuit perturbation and photon emission for failure analysis and yield enhancement

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)

The transparency of the silicon substrate in CMOS circuits to near infra-red light has enabled a rich variety of optical techniques for observing and modifying circuit behavior. The main classes of optical analysis techniques are photon emission, laser-induced circuit perturbation, and laser probing. Recent innovations in laser probing present significant new opportunities for failure analysis and yield enhancement. This paper presents several case studies with particular emphasis on how the new laser probing techniques complement and extend the established approaches.

Published in:

Reliability Physics Symposium (IRPS), 2012 IEEE International

Date of Conference:

15-19 April 2012