Cart (Loading....) | Create Account
Close category search window
 

Self-Calibration for MEMS With Comb Drives: Measurement of Gap

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Fengyuan Li ; Sch. of Mech. Eng., Purdue Univ., West Lafayette, IN, USA ; Clark, J.V.

We present a practical method for measuring planar gaps of microelectromechanical systems (MEMS) with comb drives by on- or off-chip electrical probing. We show that our method is practical, accurate, precise, and repeatable. The option of on-chip postpackaged electrical measurement enables MEMS to be autonomously self-calibratable. We use the measurement of gap to determine the geometrical difference between layout and fabrication, which can lead to measurements of other properties such as displacement, force, stiffness, and mass. Our method consists of applying enough voltage to close two unequal gaps and measuring the resulting changes in capacitances. Many MEMS designs with comb drives can be easily modified to implement our technology. Our results are an order better than convention and suggest means for further improvement.

Published in:

Microelectromechanical Systems, Journal of  (Volume:21 ,  Issue: 5 )

Date of Publication:

Oct. 2012

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.