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SiC thin-film thermistors

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2 Author(s)
T. Nagai ; Matsushita Housing Products Co. Ltd., Nara, Japan ; M. Itoh

A thermistor using an RF-sputtered SiC film has been developed as a temperature sensor for cooking products. Since the SiC film has the advantage of being able to detect temperatures over the wide range of 0-500°C with a good thermal stability, the thermistor can be applied not only to a conventional oven but also to a pyrolytic self-cleaning oven. Since the thermistor can detect surface temperatures with a rapid thermal response by contacting physically with an outer surface of an object, it can be also applied to a surface cooking top. The construction, electrical properties, and forming method of the SiC thin-film thermistor and applications to cooking products are described

Published in:

IEEE Transactions on Industry Applications  (Volume:26 ,  Issue: 6 )