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Pressure dependence of plasma parameters in medium-vacuum nitrogen arc discharge with the titanium cathode

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2 Author(s)
Sakaki, Mamoru ; Dept. of Electr. Eng., Kushiro Nat. Coll. of Technol., Japan ; Sakakibara, T.

The plasma properties of a medium-vacuum nitrogen arc discharge from a titanium cathode were studied. The arc chamber use was 400 mm in diameter and 600 mm in length. The cathode diameter and thickness were 64 and 25 mm, respectively. The experimental conditions are given as follows: pressure range=1×10-3~2×10-1 torr; N2 gas flow rate=6 ml/min; arc current=50 A. Electric probe characteristics are measured as a function of pressure and distance from the cathode surface. The analytical results obtained show that the electron energy distribution takes 1-Mx at pressures above 1×10-2 torr but 2-Mx at pressures under 4×10-2 torr and that the electron density has a maximum value at a certain pressure. The Ti+, Ti++, and N +2 ion spectral intensities are measured as a function of pressure and distance from the cathode surface. On comparison of these results and the electron density, the Ti+ spectral intensity turns out to be proportional to that of the electron density. This suggests that the major ion in the plasma volume is of the Ti+ species

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Plasma Science, IEEE Transactions on  (Volume:19 ,  Issue: 1 )