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High- Q 3 b/4 b RF MEMS Digitally Tunable Capacitors for 0.8–3 GHz Applications

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2 Author(s)
Chirag D. Patel ; University of California at San Diego, La Jolla ; Gabriel M. Rebeiz

A high-Q digitally tunable capacitor is demonstrated with 3 and 4 b resolutions for 0.8-3 GHz applications. The device shows a tuning range of 1.0-3.75 pF in the 3 b configuration and 1.25-3.80 pF in the 4 b configuration ( ~ 1-4 pF simulated). In addition to digital tuning, 30-530 fF of analog tuning is achieved and allows for precision tuning. The measured Q of the digitally tunable capacitor is >;100 at 1 GHz and >;60 at 2 GHz for all tuning states. A novel circular geometry maintains a high- Q as the capacitance is increased. The device is 2×1.8 mm which is ideal for tunable filters, matching networks and antennas.

Published in:

IEEE Microwave and Wireless Components Letters  (Volume:22 ,  Issue: 8 )